功能

• This piezo stage uses a digital sensor to achieve high precision, high rigidity, and high speed, while achieving a theoretical resolution of 1 nm.
• A piezo stage that can be positioned with high precision and resolution because it can be fully closed with the use of a digital sensor.
• Employing a piezo element as an actuator, it achieves a fine movement of 90 μm to 100 μm with open control and a theoretical resolution of 1 nm.
• A digital sensor (frequency → digital conversion system micro displacement sensor) is adopted as the position detection sensor to realize a display resolution of 10 nm in full closed loop control.
• By using the company's FINE series controller, the speed is increased.
• The repetition frequency is 10~15 Hz in SFS-H (direct motion). 25 Hz is achieved using the analog input of FINE-01γ.
• * The movement amount at the time of closing is about 20% of that at the time of opening.