产品详细内容
产品型号: 62-7027-93
产品品牌: KOJIMA INSTRUMENTS INC.
功能
- It is a mass flow controller with integrated display and can be driven by 100 V AC with an attached AC power adapter.
- Allows easy flow control.
- Supports a wide range of flow rates (N2 equivalent full scale: 10SCCM to 100SLM).
- Various functions such as switching display function between instantaneous flow rate and accumulated flow rate, alarm output function, pattern setting function, etc. can support various applications.
规格
- Sensor system: Thermal winding sensor
- Valve system: Proportional solenoid valve (closed when not energized)
- Indicator: Integrated
- Connection: RC 1/4
- Fluid: N2
- Control flow rate range: 0.2 ~ 10 CC/MIN (20 degrees C atmospheric pressure)
- Operating differential pressure range: 50 ~ 300 KPA
- Analog I/O: 0 -5 V
- Communications: RS 485
- Driving power: 24 VDC (includes AC power adapter for 100 VAC)
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